Correlative stitching technique for measuring flatness

Yingjie Yu

doi:10.1117/12.402604

9 October 2000 Correlative stitching technique for measuring flatness

Yingjie Yu

Proceedings Volume 4221, Optical Measurement and Nondestructive Testing: Techniques and Applications; (2000) https://doi.org/10.1117/12.402604
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

In flatness measuring by correlative stitching technique, a bigger scale's measurement can be realized by the system witha smaller measurement caliber. At the same time, high measurement precision, high spatial resolution and low price can be maintained. In this technique, mode building and solving are especially important. Aiming at some problems in common mode building and solving, the paper presents a new solving method. The iterative least-squares technique is applied in the method and it considers not only the information in height, but also the influence of the parameters in other directions which are usually predigested in common modes. By this solving method, the demand for rail of systems is decreased. Some simitations are done to testify the presented method.

Citation Download Citation

Yingjie Yu "Correlative stitching technique for measuring flatness", Proc. SPIE 4221, Optical Measurement and Nondestructive Testing: Techniques and Applications, (9 October 2000); https://doi.org/10.1117/12.402604

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KEYWORDS

Spatial resolution

3D metrology

Optical testing

Silicon

Time metrology

Mechanical engineering

Nondestructive evaluation

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