Experimental research on laser tracking system with galvanometer scanner for measuring spatial coordinates of moving target

Jia Wang; Zhaohui Hu; Yongdong Liu; Jinwen Liang

doi:10.1117/12.402600

9 October 2000 Experimental research on laser tracking system with galvanometer scanner for measuring spatial coordinates of moving target

Jia Wang, Zhaohui Hu, Yongdong Liu, Jinwen Liang

Author Affiliations +

Proceedings Volume 4221, Optical Measurement and Nondestructive Testing: Techniques and Applications; (2000) https://doi.org/10.1117/12.402600
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

The spatial position of industrial object, such as robot end- effector, is an important geometric parameter whose accuracy determines whether robot can perform accurately. Therefore, we have established a laser tracking and coordinate measuring system with galvanometer scanner for high accuracy, large range, non- contact, and spatial dynamic measurement. In this paper, the laser tracking system and its setup are illuminated at first. Then, the formulae for calculating coordinates are deduced, and the calibration method of the initial distance from tracking mirror to target is presented. After that, two preliminary experiments in different distances are described. One is on CMM; the other is with grating ruler as reference. In the former, the maximum measurement error of coordinates is 70micrometers and the maximum error of length is 35micrometers in the 85x100x100mm³ measurement volume, and in the 1m initial distance. In the later, the maximum error of length is 140micrometers in the range of 480mm, and in the 5m initial distance. At the end of the paper, the error sources are analyzed and simulated.

Citation Download Citation

Jia Wang, Zhaohui Hu, Yongdong Liu, and Jinwen Liang "Experimental research on laser tracking system with galvanometer scanner for measuring spatial coordinates of moving target", Proc. SPIE 4221, Optical Measurement and Nondestructive Testing: Techniques and Applications, (9 October 2000); https://doi.org/10.1117/12.402600

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