Nondestructive survey of a buried surface and interface structure by x-ray scattering

Wenjun Ma; J. E. Macdonald; Gang Jia

doi:10.1117/12.402614

9 October 2000 Nondestructive survey of a buried surface and interface structure by x-ray scattering

Wenjun Ma, J. E. Macdonald, Gang Jia

Proceedings Volume 4221, Optical Measurement and Nondestructive Testing: Techniques and Applications; (2000) https://doi.org/10.1117/12.402614
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

X-ray scattering as a nondestructive probe was used in studying surface and interface structure. Two monolayers InAs was found to be existence between InGaAs and InP by simulating scattering data. The interfacial effects on peak-separation of substrate to epilayer and on layer thickness were simulated.

Citation Download Citation

Wenjun Ma, J. E. Macdonald, and Gang Jia "Nondestructive survey of a buried surface and interface structure by x-ray scattering", Proc. SPIE 4221, Optical Measurement and Nondestructive Testing: Techniques and Applications, (9 October 2000); https://doi.org/10.1117/12.402614

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available