Shadow moire profilometry by frequency sweeping

Lianhua Jin; Yukitoshi Otani; Toru Yoshizawa

doi:10.1117/12.402589

9 October 2000 Shadow moire profilometry by frequency sweeping

Lianhua Jin, Yukitoshi Otani, Toru Yoshizawa

Proceedings Volume 4221, Optical Measurement and Nondestructive Testing: Techniques and Applications; (2000) https://doi.org/10.1117/12.402589
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

The frequency sweeping technique is proposed to measure the shape of objects with discontinuous height steps and/or spatially separated surfaces, which have been impossible to measure with conventional shadow moire topography. By controlling the amount of the rotation angle of the grating, the spatiotemporal moire patterns are produced with different contour intervals. The Fourier transform technique has been applied to analyze these patterns and obtain the temporal carrier frequency in which the height distribution of the object is involved. Experimental results show the validity of this method.

Citation Download Citation

Lianhua Jin, Yukitoshi Otani, and Toru Yoshizawa "Shadow moire profilometry by frequency sweeping", Proc. SPIE 4221, Optical Measurement and Nondestructive Testing: Techniques and Applications, (9 October 2000); https://doi.org/10.1117/12.402589

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