CVD diamond micro hinge for MOEMS applications

Guifu Ding; Xiaolin Zhao; Xiang Yao; Tianhui Shen

doi:10.1117/12.401753

5 October 2000 CVD diamond microhinge for MOEMS applications

Guifu Ding, Xiaolin Zhao, Xiang Yao, Tianhui Shen

Proceedings Volume 4223, Instruments for Optics and Optoelectronic Inspection and Control; (2000) https://doi.org/10.1117/12.401753
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

CVD diamond films is one of the most interesting materials under consideration for microelectromechanical system (MEMS), especially for optical MEMS, but diamond is difficult to be fabricated due to its hardness and chemical inertness, for this purpose, we have developed a patterning process based on O₂RIE etching of CVD diamond films and formed a new type of surface micromachining process for microfabricating of diamond MOEMS microparts, combining with sacrificial releasing and electroplating through mask techniques, this surface micromachining process is able to fabricate fine lines and complicated microstructures, and a diamond micro hinge for free-space micro-optical bench has been fabricated by this process successfully.

Citation Download Citation

Guifu Ding, Xiaolin Zhao, Xiang Yao, and Tianhui Shen "CVD diamond microhinge for MOEMS applications", Proc. SPIE 4223, Instruments for Optics and Optoelectronic Inspection and Control, (5 October 2000); https://doi.org/10.1117/12.401753

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available