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5 October 2000 CVD diamond microhinge for MOEMS applications
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Proceedings Volume 4223, Instruments for Optics and Optoelectronic Inspection and Control; (2000) https://doi.org/10.1117/12.401753
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China
Abstract
CVD diamond films is one of the most interesting materials under consideration for microelectromechanical system (MEMS), especially for optical MEMS, but diamond is difficult to be fabricated due to its hardness and chemical inertness, for this purpose, we have developed a patterning process based on O2RIE etching of CVD diamond films and formed a new type of surface micromachining process for microfabricating of diamond MOEMS microparts, combining with sacrificial releasing and electroplating through mask techniques, this surface micromachining process is able to fabricate fine lines and complicated microstructures, and a diamond micro hinge for free-space micro-optical bench has been fabricated by this process successfully.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Guifu Ding, Xiaolin Zhao, Xiang Yao, and Tianhui Shen "CVD diamond microhinge for MOEMS applications", Proc. SPIE 4223, Instruments for Optics and Optoelectronic Inspection and Control, (5 October 2000); https://doi.org/10.1117/12.401753
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