Paper
5 October 2000 Design of optical waveguides with new silicone-based polymers
Qiong Xie, Zhene Xu
Author Affiliations +
Proceedings Volume 4223, Instruments for Optics and Optoelectronic Inspection and Control; (2000) https://doi.org/10.1117/12.401805
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China
Abstract
Single-mode optical waveguides have ben fabricated form the silicon-based polymer with good transparency in this paper. The waveguides with novel structure can be easily processing by the common spin coating technique. These waveguides have high thermal stability because of high temperature curing. In addition, they can operate in single mode and have lower optical losses.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Qiong Xie and Zhene Xu "Design of optical waveguides with new silicone-based polymers", Proc. SPIE 4223, Instruments for Optics and Optoelectronic Inspection and Control, (5 October 2000); https://doi.org/10.1117/12.401805
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CITATIONS
Cited by 1 scholarly publication.
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KEYWORDS
Waveguides

Polymers

Silicon

Silica

Refractive index

Cladding

Reactive ion etching

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