Differential confocal microscopy with annular pupil filter

Li Liu; Xiaoqiang Deng; Lisong Yang; Guiying Wang; Zhizhan Xu

doi:10.1117/12.403930

11 October 2000 Differential confocal microscopy with annular pupil filter

Li Liu, Xiaoqiang Deng, Lisong Yang, Guiying Wang, Zhizhan Xu

Proceedings Volume 4224, Biomedical Photonics and Optoelectronic Imaging; (2000) https://doi.org/10.1117/12.403930
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

We combine the differential confocal microscopy and annular pupil filter together. The theory of differential confocal microscopy and the property of the annular pupil filter are discussed in detail. The results of computer simulation and experiment prove that this method can extend the axial dynamic range and improve transversal resolution of 3D profilometry at sacrificing axial resolution.

Citation Download Citation

Li Liu, Xiaoqiang Deng, Lisong Yang, Guiying Wang, and Zhizhan Xu "Differential confocal microscopy with annular pupil filter", Proc. SPIE 4224, Biomedical Photonics and Optoelectronic Imaging, (11 October 2000); https://doi.org/10.1117/12.403930

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