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9 October 2000 Integrated multimode interference couplers in silicon-on insulator
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Proceedings Volume 4225, Optical Interconnects for Telecommunication and Data Communications; (2000) https://doi.org/10.1117/12.402688
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China
Abstract
Silicon-on insulator (SOI) is an attractive platform for the fabrication of optoelectronic integrated circuit. Thin cladding layers (< 1.0 micrometer) can be used in SOI waveguide due to the large index step between Si and SiO2, making them compatible with the VLSI technology. Here we demonstrate the fabrication of 1 X 4 and 2 X 2 multimode interference (MMI) coupler based on SOI technology. Performances of the devices are analyzed. The minimum excess loss of the devices is about 1.8 dB. The devices show uniform power distribution.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hongzhen Wei, Jinzhong Yu, Xiaofeng Zhang, Zhongli Liu, Hongzhi Ma, Guohua Li, Wei Shi, and Changshui Fang "Integrated multimode interference couplers in silicon-on insulator", Proc. SPIE 4225, Optical Interconnects for Telecommunication and Data Communications, (9 October 2000); https://doi.org/10.1117/12.402688
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