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20 October 2000 Linewidth control performance enhancement using novel compensation techniques for DUV scanners
James G. Tsacoyeanes, Pradeep K. Govil, J. Christian Swindal, Keith W. Andresen, Javed Sumra
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Proceedings Volume 4226, Microlithographic Techniques in Integrated Circuit Fabrication II; (2000) https://doi.org/10.1117/12.404854
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore
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James G. Tsacoyeanes, Pradeep K. Govil, J. Christian Swindal, Keith W. Andresen, and Javed Sumra "Linewidth control performance enhancement using novel compensation techniques for DUV scanners", Proc. SPIE 4226, Microlithographic Techniques in Integrated Circuit Fabrication II, (20 October 2000); https://doi.org/10.1117/12.404854
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KEYWORDS
Deep ultraviolet
Scanners
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