Patternable hybrid sol-gel glass

HongJin Jiang; XiaoCong Yuan; Yuen Chuen Chan; Yee Loy Lam

doi:10.1117/12.404848

20 October 2000 Patternable hybrid sol-gel glass

HongJin Jiang, XiaoCong Yuan, Yuen Chuen Chan, Yee Loy Lam

Proceedings Volume 4226, Microlithographic Techniques in Integrated Circuit Fabrication II; (2000) https://doi.org/10.1117/12.404848
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore

Abstract

The hybrid sol-gel materials have been extensively studied and widely used in the fabrication of optical devices due to their attractive properties. In this work, the synthesis of the UV sensitive organic- inorganic SiO₂/TiO₂ sol-gel glass is presented. The effect of the fabrication parameters such as doping concentration, bake temperature and UV light exposure time on the film characteristics (thickness and refractive index) are studied. A simple way of patterning the material by UV light radiation is also introduced. These demonstrate the material possesses high potential application for the micro-optics device fabrication.

Citation Download Citation

HongJin Jiang, XiaoCong Yuan, Yuen Chuen Chan, and Yee Loy Lam "Patternable hybrid sol-gel glass", Proc. SPIE 4226, Microlithographic Techniques in Integrated Circuit Fabrication II, (20 October 2000); https://doi.org/10.1117/12.404848

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