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24 October 2000 CAD modeling of scratch drive actuation
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Proceedings Volume 4228, Design, Modeling, and Simulation in Microelectronics; (2000) https://doi.org/10.1117/12.405398
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore
Abstract
Assembled MEMS structures provide a unique design opportunity by overcoming the inherent planarity of the MEMS fabrication process, allowing for added flexibility and new application areas. However, post-process assembly of these devices is frequently problematic. Force and displacement controls are often imprecise at the microscale resulting in damage to the device. In contrast, self-assembling MEMS structures can avoid external manipulation and therefore can be less likely to suffer damage. Self-assembly, though, requires the added complexity of integrated actuation.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Nora Finch, James Marchetti, Hiroyuki Fujita, and Jean-Philippe Gouy "CAD modeling of scratch drive actuation", Proc. SPIE 4228, Design, Modeling, and Simulation in Microelectronics, (24 October 2000); https://doi.org/10.1117/12.405398
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