Tuning dielectric constant and Young's modulus by nanofabrication

Chang Qing Sun; Beng Kang Tay; Shu Ping Lau; Xiao Wei Sun

doi:10.1117/12.405426

24 October 2000 Tuning dielectric constant and Young's modulus by nanofabrication

Chang Qing Sun, Beng Kang Tay, Shu Ping Lau, Xiao Wei Sun

Proceedings Volume 4228, Design, Modeling, and Simulation in Microelectronics; (2000) https://doi.org/10.1117/12.405426
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore

Abstract

Understanding the origin, the trend and the scale of the relative change of the mechanical strength and the dielectric properties of a nanometric solid is of great importance in designing solid-state device. Here we present a model that describes the nature and behavior of a nanosolid including spherical dots, wires and ultrathin films. Consistency between predictions and experimental observations confirms that the size-driven property-change originates from the chemical bond contraction at surface and the rise in the surface-to-volume ratio of the nanosolid. It is found that the bond contracts by as high as 14 percent and the corresponding Young's modulus increase by 100 percent at surface, and that the dielectric constant of semiconductors decreases with reducing the dimension of the solid, which leads to the blue shift in the photoluminescence and absorption edges.

Citation Download Citation

Chang Qing Sun, Beng Kang Tay, Shu Ping Lau, and Xiao Wei Sun "Tuning dielectric constant and Young's modulus by nanofabrication", Proc. SPIE 4228, Design, Modeling, and Simulation in Microelectronics, (24 October 2000); https://doi.org/10.1117/12.405426

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