Improvements of an x-ray microcalorimeter for detecting cosmic rays

Yuichi Yokoyama; Shuichi Shoji; Kazuhisa Mitsuda; Ryuichi Fujimoto; Toshiyuki Miyazaki; Tohru Oshima; Masahiro Yamazaki; Naoko Iyomoto; Kazuo Futamoto; Yoshinao Ishizaki; Tomohiro Kagei

doi:10.1117/12.404915

20 October 2000 Improvements of an x-ray microcalorimeter for detecting cosmic rays

Yuichi Yokoyama, Shuichi Shoji, Kazuhisa Mitsuda, Ryuichi Fujimoto, Toshiyuki Miyazaki, Tohru Oshima, Masahiro Yamazaki, Naoko Iyomoto, Kazuo Futamoto, Yoshinao Ishizaki, Tomohiro Kagei

Author Affiliations +

Proceedings Volume 4230, Micromachining and Microfabrication; (2000) https://doi.org/10.1117/12.404915
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore

Abstract

An X-ray microcalorimeter that consists of an x-ray absorber to transfer the incident photon energy to the temperature rise, a temperature sensor to detect the temperature change and suspending beams for thermal isolation from the substrate have been fabricated. Titanium/Gold thin film transition edge sensor (TES) is used as the temperature sensor. We fabricated and tested the first prototype in the previous study and obtained the transition temperature of 0.52 K, energy resolution of 550 eV (FWHM) for 6 keV radiation. These values were smaller than that of expected. We applied a Sn absorber and redesigned the microstructure of the x-ray microcalorimeter. Consequently, we have obtained 158 eV at 5.9 keV radiation of the energy resolution, which is about 4 times higher than that of the first prototype. This value is nearly equal to the conventional X-ray CCD. The highest energy resolution of the x-ray microcalorimeter of our design is estimated to approximately 5 eV at the operating point of 0.2 K. To realize such a good energy resolution calorimeter array, we are going to improve the sensitivity of the TES by optimizing the process condition. A Sn absorber formed by electroplating is also under evaluating simultaneously. It is necessary to fabricate uniform array structures.

Citation Download Citation

Yuichi Yokoyama, Shuichi Shoji, Kazuhisa Mitsuda, Ryuichi Fujimoto, Toshiyuki Miyazaki, Tohru Oshima, Masahiro Yamazaki, Naoko Iyomoto, Kazuo Futamoto, Yoshinao Ishizaki, and Tomohiro Kagei "Improvements of an x-ray microcalorimeter for detecting cosmic rays", Proc. SPIE 4230, Micromachining and Microfabrication, (20 October 2000); https://doi.org/10.1117/12.404915

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available