Integrated WDM frequency tuner using polysilicon surface micromachining process

Xu Ming Zhang; Yee Loy Lam; Ai Qun Liu

doi:10.1117/12.404903

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20 October 2000 Integrated WDM frequency tuner using polysilicon surface micromachining process

Xu Ming Zhang, Yee Loy Lam, Ai Qun Liu

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Proceedings Volume 4230, Micromachining and Microfabrication; (2000) https://doi.org/10.1117/12.404903
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore

Abstract

Two monolithically-integrated tunable lasers have been analyzed, designed and fabricated. The potential applications for WDM have also been studied. The tunable lasers use 3D micromirrors integrated with single-mode Fabry-Perot laser diodes and anti-reflection coated optical fibers. The difference between the two tunable lasers is that one uses the movable 3D micromirror driven by comb- drive to change the external cavity length, and the other uses the rotatable 3D micromirror driven by thermal-actuator to change the external feedback strength. For the frequency tuner that uses movable 3D micromirror, a wavelength tunability of 16 nm is obtained using 3V driving voltage. As for the frequency tuner that uses rotatable 3D micromirror, a wavelength tunability of 7 nm is obtained while using 10 mA driving current.

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Xu Ming Zhang, Yee Loy Lam, and Ai Qun Liu "Integrated WDM frequency tuner using polysilicon surface micromachining process", Proc. SPIE 4230, Micromachining and Microfabrication, (20 October 2000); https://doi.org/10.1117/12.404903

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