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20 October 2000 Novel self-oscillating anemometer with capacitance-based sensing
Yen-Peng Kong, Francis E.H. Tay, Yuan Xu
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Proceedings Volume 4230, Micromachining and Microfabrication; (2000) https://doi.org/10.1117/12.404889
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore
Abstract
In this paper, the feasibility of a self-oscillating anemometer is examined. A 2D numerical study of a novel self-oscillating anemometer that can be fabricated using micromachining techniques is performed. The device is essentially a square cylinder suspended in the fluid flow by a fixed beam. The flow velocity can be easily measured by determining the frequency of oscillation obtained from capacitance sensing. Anemometer with different length scales can be fabricated to enable different ranges of velocities to be measured.
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Yen-Peng Kong, Francis E.H. Tay, and Yuan Xu "Novel self-oscillating anemometer with capacitance-based sensing", Proc. SPIE 4230, Micromachining and Microfabrication, (20 October 2000); https://doi.org/10.1117/12.404889
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KEYWORDS
Velocity measurements
Microfluidics
Sensors
Capacitance
Computational fluid dynamics
Micromachining
Electrodes
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