Tools and processes for MEMS and nanotechnology

Philip D. Prewett; Syed Ejazu Huq; M. C. L. Ward

doi:10.1117/12.404911

20 October 2000 Tools and processes for MEMS and nanotechnology

Philip D. Prewett, Syed Ejazu Huq, M. C. L. Ward

Proceedings Volume 4230, Micromachining and Microfabrication; (2000) https://doi.org/10.1117/12.404911
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore

Abstract

Research into Microelectromechanics (MEMS) and Nanotechnology covers the range of feature dimensions from submillimeter to nanometer scales. It relies upon tools and processes for lithography and pattern transfer drawn largely but not exclusively from the silicon semiconductor industry. Optical lithography systems, particle beam nanowriter tools and X-ray sources may be regarded as the `machine tools' for MEMS and Nanotechnology, each with their unique advantages and limitations. They are being exploited for R&D applications ranging from customized MEMS to vacuum microelectronics and novel nanotools such as electron microcolumns and multiple tip scanning probe systems.

Citation Download Citation

Philip D. Prewett, Syed Ejazu Huq, and M. C. L. Ward "Tools and processes for MEMS and nanotechnology", Proc. SPIE 4230, Micromachining and Microfabrication, (20 October 2000); https://doi.org/10.1117/12.404911

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