Characterization of magnesium-modified lead titanate thin films derived from a diol-based sol-gel process

Chih-Ming Wang; Ying-Chung Chen; Ming-Cheng Kao; Yun-Hsing Lai

doi:10.1117/12.424421

6 April 2001 Characterization of magnesium-modified lead titanate thin films derived from a diol-based sol-gel process

Chih-Ming Wang, Ying-Chung Chen, Ming-Cheng Kao, Yun-Hsing Lai

Proceedings Volume 4234, Smart Materials; (2001) https://doi.org/10.1117/12.424421
Event: Smart Materials and MEMS, 2000, Melbourne, Australia

Abstract

Polycrystalline thin films of Mg-modified lead titanate (PMT) were deposited on Pt/SiO₂/Si substrates using a diol-based sol-gel process. 1,3-propanediol was used as solvent to minimize the number of cycles of spin coating and drying processes to obtain the desired thickness of high quality thin film. By changing the Mg content (2 to approximately 8 mol%) and heating temperature (500 to approximately 800 degrees Celsius), the influences of various processing parameters on the characteristics of thin films were studied. With the increase of the Mg content, the relative dielectric constant ((epsilon) _r) of PMT thin film increased from 39 to 91 at the heating temperature of 700 degrees Celsius. It was found that the coercive field (Ec) and the remanent polarization (Pr) decreased, but the pyroelectric coefficient (gamma) increased with an increase of Mg content. The results reveal that PMT thin film with a Mg content of 6 mol% exhibits the largest figures of merit for the voltage responsivity and the specific detectivity at a heating temperature of 700 degrees Celsius.

Citation Download Citation

Chih-Ming Wang, Ying-Chung Chen, Ming-Cheng Kao, and Yun-Hsing Lai "Characterization of magnesium-modified lead titanate thin films derived from a diol-based sol-gel process", Proc. SPIE 4234, Smart Materials, (6 April 2001); https://doi.org/10.1117/12.424421

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