Environment-induced failure modes of thin film resonators

Robert Kazinczi; Jeff R. Mollinger; Andre Bossche

doi:10.1117/12.424415

6 April 2001 Environment-induced failure modes of thin film resonators

Robert Kazinczi, Jeff R. Mollinger, Andre Bossche

Proceedings Volume 4234, Smart Materials; (2001) https://doi.org/10.1117/12.424415
Event: Smart Materials and MEMS, 2000, Melbourne, Australia

Abstract

Resonant mode micromechanical devices have great potentials due to their high sensitivity and easy signal processing. As they are also sensitive to environmental effects, vacuum packaging is often required, which largely increases the costs. The current study focuses on such environment induced reliability problems and degradation processes. Stiffening effect was observed on thin silicon nitride and silicon carbide cantilever beams in air. The resonance frequency gradually increases in time. When the cantilever is subjected to mechanical shock or large deflection, the resonance frequency suddenly drops, and then increases again. Air, increased humidity, argon rich and nitrogen rich atmosphere influence the stiffening and the shock response behavior. The effects are explained with the surface oxidation model. The oxide layer introduces stress in the structure increasing the overall stiffness, while mechanical shocks crack the layer. Silicon resonators gather airborne particles from the atmosphere due to electrostatic charging. The extra mass results in decrease of the resonant frequency. All these processes lead to unstable resonance frequency and thus to failure of the resonant mode device. Tests in inert environment suggest cheap atmospheric packaging solution to obtain reliable operation and yet good performance.

Citation Download Citation

Robert Kazinczi, Jeff R. Mollinger, and Andre Bossche "Environment-induced failure modes of thin film resonators", Proc. SPIE 4234, Smart Materials, (6 April 2001); https://doi.org/10.1117/12.424415

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available