Snap-down phenomenon in an electrostatically actuated torsional micromirror

Fook Siong Chau; Xuming Zhang; Chenggen Quan; Ai Qun Liu

doi:10.1117/12.420880

21 March 2001 Snap-down phenomenon in an electrostatically actuated torsional micromirror

Fook Siong Chau, Xuming Zhang, Chenggen Quan, Ai Qun Liu

Proceedings Volume 4235, Smart Structures and Devices; (2001) https://doi.org/10.1117/12.420880
Event: Smart Materials and MEMS, 2000, Melbourne, Australia

Abstract

In this paper, the snap-down phenomenon in an electrostatically-actuated torsional micromirror is investigated. Based on the static actuation relation of torsional micromirrors, the relationship between snap-down angle and the structural parameters of the torsional micromirror is derived. It is shown that the snap-down angle is mainly determined by the size and position of the electrodes. Most importantly, it is found that the product of the normalized snap-down angle and the normalized size of the electrode is equal to a constant of 0.4404, which is universal for all torsional micromirrors of this kind of configuration, and is very useful for micromirror design. The relationship between the maximum driving voltage and the snap-down angle is also studied. Finally, a group of torsional micromirrors has been fabricated using multi-layer polysilicon processes, and then been tested to verify the analysis.

Citation Download Citation

Fook Siong Chau, Xuming Zhang, Chenggen Quan, and Ai Qun Liu "Snap-down phenomenon in an electrostatically actuated torsional micromirror", Proc. SPIE 4235, Smart Structures and Devices, (21 March 2001); https://doi.org/10.1117/12.420880

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available