Application of MEMS in microwave and millimeter wave systems

Vijay K. Varadan; K. J. Vinoy; Hargsoon Yoon; K. A. Jose; Vasundara V. Varadan

doi:10.1117/12.418756

16 March 2001 Application of MEMS in microwave and millimeter wave systems

Vijay K. Varadan, K. J. Vinoy, Hargsoon Yoon, K. A. Jose, Vasundara V. Varadan

Proceedings Volume 4236, Smart Electronics and MEMS II; (2001) https://doi.org/10.1117/12.418756
Event: Smart Materials and MEMS, 2000, Melbourne, Australia

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Vijay K. Varadan, K. J. Vinoy, Hargsoon Yoon, K. A. Jose, and Vasundara V. Varadan "Application of MEMS in microwave and millimeter wave systems", Proc. SPIE 4236, Smart Electronics and MEMS II, (16 March 2001); https://doi.org/10.1117/12.418756

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