Electroplated microneedle array for biomedical applications

Kuo Kang Liu; Z. H. Du; F. G. Tseng; Min-Chieh Chou; J. Y. Fang; C. C. Chieng

doi:10.1117/12.418774

16 March 2001 Electroplated microneedle array for biomedical applications

Kuo Kang Liu, Z. H. Du, F. G. Tseng, Min-Chieh Chou, J. Y. Fang, C. C. Chieng

Proceedings Volume 4236, Smart Electronics and MEMS II; (2001) https://doi.org/10.1117/12.418774
Event: Smart Materials and MEMS, 2000, Melbourne, Australia

Abstract

NiICo microneedle arrays, which are fabricated by conventional near UV lithography and chemical electroplating process on a silicon wafer, are reported here. These metallic microneedles with annular structure could be easily incorporated with micropump for drug delivery and in-situ physiological fluid sampling. The mechanical strength inherent in the alloy provides excellent durability for the needles to sustain in process and clinic test.

Citation Download Citation

Kuo Kang Liu, Z. H. Du, F. G. Tseng, Min-Chieh Chou, J. Y. Fang, and C. C. Chieng "Electroplated microneedle array for biomedical applications", Proc. SPIE 4236, Smart Electronics and MEMS II, (16 March 2001); https://doi.org/10.1117/12.418774

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