Paper
16 March 2001 Highly sensitive and wide-dynamic-range navigation microsystem on a single chip
Author Affiliations +
Proceedings Volume 4236, Smart Electronics and MEMS II; (2001) https://doi.org/10.1117/12.418750
Event: Smart Materials and MEMS, 2000, Melbourne, Australia
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© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vijay K. Varadan, K. A. Jose, and Vasundara V. Varadan "Highly sensitive and wide-dynamic-range navigation microsystem on a single chip", Proc. SPIE 4236, Smart Electronics and MEMS II, (16 March 2001); https://doi.org/10.1117/12.418750
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Cited by 6 scholarly publications.
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KEYWORDS
Microsystems

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