Laser fabrication and assembly processes for MEMS

Andrew S. Holmes

doi:10.1117/12.432522

29 June 2001 Laser fabrication and assembly processes for MEMS

Andrew S. Holmes

Proceedings Volume 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI; (2001) https://doi.org/10.1117/12.432522
Event: Photonics West 2001 - LASE, 2001, San Jose, CA, United States

Abstract

This paper discusses the use of high power lasers in the manufacture of microelectromechanical systems (MEMS). The ability to process a wide range of materials, and to produce truly three-dimensional structures with tolerances at the micron or sub-micron level, give laser micromachining some key advantages over other more established micromachining techniques. Previous work in this area is reviewed, covering the following topics: use of ablation in the direct fabrication of MEMS devices and to define polymer masters for subsequent replication by electroforming and moulding (the so-called Laser-LIGA process); laser-assisted deposition and etching on planar and non-planar surfaces; laser-assisted manipulation of microparts and laser-assisted assembly.

Citation Download Citation

Andrew S. Holmes "Laser fabrication and assembly processes for MEMS", Proc. SPIE 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI, (29 June 2001); https://doi.org/10.1117/12.432522

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