1-J and 300-W excimer laser with exceptional pulse stability for poly-Si crystallization

Michael Fiebig; Uwe Stamm; Peter Oesterlin; Naoyuki Kobayashi; Burkhard Fechner

doi:10.1117/12.424885

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30 April 2001 1-J and 300-W excimer laser with exceptional pulse stability for poly-Si crystallization

Michael Fiebig, Uwe Stamm, Peter Oesterlin, Naoyuki Kobayashi, Burkhard Fechner

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Proceedings Volume 4295, Flat Panel Display Technology and Display Metrology II; (2001) https://doi.org/10.1117/12.424885
Event: Photonics West 2001 - Electronic Imaging, 2001, San Jose, CA, United States

Abstract

Liquid-crystal displays (LCDs) especially active-matrix LCDs are conquering the display market. The market has forced a continuous process development to fulfill all of the demands from the various fields like car navigation systems, multi- media applications, laptop computers or PC displays. The LCD manufacturers face a constant challenge to produce higher performance display at lower costs. Therefore, they are looking for the most cost effective and best production technique.

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Michael Fiebig, Uwe Stamm, Peter Oesterlin, Naoyuki Kobayashi, and Burkhard Fechner "1-J and 300-W excimer laser with exceptional pulse stability for poly-Si crystallization", Proc. SPIE 4295, Flat Panel Display Technology and Display Metrology II, (30 April 2001); https://doi.org/10.1117/12.424885

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