Smart-power integrated circuits to drive piezoelectric actuators for a cm3 microrobot system

Manel Puig-Vidal; J. Lopez-Sanchez; P. Miribel-Catala; Enric Montane; Sebastian A. Bota; Josep Samitier; Urban Simu; Stefan A. I. Johansson

doi:10.1117/12.436628

16 August 2001 Smart-power integrated circuits to drive piezoelectric actuators for a cm³ microrobot system

Manel Puig-Vidal, J. Lopez-Sanchez, P. Miribel-Catala, Enric Montane, Sebastian A. Bota, Josep Samitier, Urban Simu, Stefan A. I. Johansson

Author Affiliations +

Proceedings Volume 4334, Smart Structures and Materials 2001: Smart Electronics and MEMS; (2001) https://doi.org/10.1117/12.436628
Event: SPIE's 8th Annual International Symposium on Smart Structures and Materials, 2001, Newport Beach, CA, United States

Abstract

Today, the use of robots for self acting tasks in applications ranging from biology and medicine to microsystems technology demand miniaturized dimensions and high-precision handling techniques. A lot of these tasks have been carried out by humans, but the manual capabilities are restricted to certain tolerances. Transport and manipulation of biological cells or assembly of micromechanical parts are the best suited applications for microrobots with sizes about cm³. Low cost and high-resolution actuators are critical performances which determine to choose piezoceramic materials as more suitable for micropositioning and micromanipulation units of a cm3 microrobot. Smart Piezoactuator Unit (SPUs) as a basic element of a new generation of cm³ microrobots have been developped. The main characteristic of this proposed Smart Piezoactuator Unit system is the integration of driving circuitry with the piezoelectric actuators and to include a serial communication interface to minimize the number of power and command wires. Micropositioning and micromanipulation units are developed combining properly 6 Smart Piezoactuator Units each one. A BCD technology (Bipolar, CMOS, DMOS) is used to design high voltage smart power integrated circuit for these Smart Piezoactuator Units. Using this technology we integrate in the same chip 4 power drivers with its control and protection circuitry.

Citation Download Citation

Manel Puig-Vidal, J. Lopez-Sanchez, P. Miribel-Catala, Enric Montane, Sebastian A. Bota, Josep Samitier, Urban Simu, and Stefan A. I. Johansson "Smart-power integrated circuits to drive piezoelectric actuators for a cm³ microrobot system", Proc. SPIE 4334, Smart Structures and Materials 2001: Smart Electronics and MEMS, (16 August 2001); https://doi.org/10.1117/12.436628

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