Compact Z-pinch EUV source for photolithography

Guido Schriever; Manfred Rahe; Uwe Stamm; Dirk Basting; Oleg B. Khristoforov; Aleksandr Yu. Vinokhodov; Vladimir M. Borisov

doi:10.1117/12.436716

20 August 2001 Compact Z-pinch EUV source for photolithography

Guido Schriever, Manfred Rahe, Uwe Stamm, Dirk Basting, Oleg B. Khristoforov, Aleksandr Yu. Vinokhodov, Vladimir M. Borisov

Author Affiliations +

Proceedings Volume 4343, Emerging Lithographic Technologies V; (2001) https://doi.org/10.1117/12.436716
Event: 26th Annual International Symposium on Microlithography, 2001, Santa Clara, CA, United States

Abstract

According to Sematech International's analysis extreme ultraviolet (EUV) photolithography is one of the most promising approaches for next generation lithography (NGL). The insertion point of NGL is likely at the 50 nm node. To establish EUV lithography all basic technologies have to be developed t material suppliers, source suppliers, coating manufacturers, optics, lens and tool manufacturers, mask houses, pellicle manufacturers and resist suppliers over the next years. To achieve the required throughput in production various concepts of EUV sources are currently under investigation. Here we discuss new results of design studies on gas discharge Z-pinch sources. Form the EUV source 1 W output power at 100 Hz repetition rate could be obtained in continuous operation. Pulse energy stability is 4% (sigma). In burst operation repetition rate of up to 400 Hz is possible with the current design.

Citation Download Citation

Guido Schriever, Manfred Rahe, Uwe Stamm, Dirk Basting, Oleg B. Khristoforov, Aleksandr Yu. Vinokhodov, and Vladimir M. Borisov "Compact Z-pinch EUV source for photolithography", Proc. SPIE 4343, Emerging Lithographic Technologies V, (20 August 2001); https://doi.org/10.1117/12.436716

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available