193 SLR system based on COMA/acryl hybrid system

Masafumi Yamamoto; Kiyoshi Murata; Hiroyuki Ishii; Satoshi Ebata; Toru Kajita; Tsutomu Shimokawa

doi:10.1117/12.436839

24 August 2001 193 SLR system based on COMA/acryl hybrid system

Masafumi Yamamoto, Kiyoshi Murata, Hiroyuki Ishii, Satoshi Ebata, Toru Kajita, Tsutomu Shimokawa

Proceedings Volume 4345, Advances in Resist Technology and Processing XVIII; (2001) https://doi.org/10.1117/12.436839
Event: 26th Annual International Symposium on Microlithography, 2001, Santa Clara, CA, United States

Abstract

Cycloolefin / maleic anhydride copolymer system (COMA) is one of the promising approach to high performance single layer resist for 193nm lithography. Since hydrophilicity of the material is required for more adhesion to inorganic substrates, several acrylate monomers with hydroxyl-functionalized alicyclic pendant groups were applied into acrylate-hybrid COMA systems. The hydrophilicity of each chemical was estimated by the computer aided group contribution method. Several COMA/acrylate-hybrid polymers were synthesized by radical polymerization, and the dark film loss measurement and resin characterization experiments regarding new hybrid resins were carried out. A resist comprising an optimized hybrid polymer has shown 60nm isolated line on a 0.55NA micro-stepper without any optical enhancement techniques, and another resist could print 110nm line/325nm pitch with micrometers DOF on SiON substrate.

Citation Download Citation

Masafumi Yamamoto, Kiyoshi Murata, Hiroyuki Ishii, Satoshi Ebata, Toru Kajita, and Tsutomu Shimokawa "193 SLR system based on COMA/acryl hybrid system", Proc. SPIE 4345, Advances in Resist Technology and Processing XVIII, (24 August 2001); https://doi.org/10.1117/12.436839

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