Alternating PSM mask performance: a study of multiple fabrication technique results

Martin McCallum; Patricia Gabella; Gilbert V. Shelden; Kevin Kjoller; Edward Kirk Miller

doi:10.1117/12.435771

14 September 2001 Alternating PSM mask performance: a study of multiple fabrication technique results

Martin McCallum, Patricia Gabella, Gilbert V. Shelden, Kevin Kjoller, Edward Kirk Miller

Proceedings Volume 4346, Optical Microlithography XIV; (2001) https://doi.org/10.1117/12.435771
Event: 26th Annual International Symposium on Microlithography, 2001, Santa Clara, CA, United States

Abstract

In this paper we will discuss the results obtained from five alternating aperture phase-shifting masks (altPSM), each with an identical layout but manufactured using a different technique. We will show the results obtained for mask CD performance measured on a SEM for a number of dimensions and duty cycles. We will show how the results obtained from conventional mask metrology compare with results from advanced analysis including mask topography information obtained using an automated atomic force microscope (AFM). Comparison will be made showing how the metrology structures on the mask compare to the actual structures in the patterning area. A comparison of the results achieved from each mask manufacturing technique will also be made.

Citation Download Citation

Martin McCallum, Patricia Gabella, Gilbert V. Shelden, Kevin Kjoller, and Edward Kirk Miller "Alternating PSM mask performance: a study of multiple fabrication technique results", Proc. SPIE 4346, Optical Microlithography XIV, (14 September 2001); https://doi.org/10.1117/12.435771

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available