Roles of NA, sigma, and lambda in low-k1 aerial image formation

Peter D. Brooker

doi:10.1117/12.435713

14 September 2001 Roles of NA, sigma, and lambda in low-k1 aerial image formation

Peter D. Brooker

Proceedings Volume 4346, Optical Microlithography XIV; (2001) https://doi.org/10.1117/12.435713
Event: 26th Annual International Symposium on Microlithography, 2001, Santa Clara, CA, United States

Abstract

The purpose of this paper is to introduce the fundamental concepts needed to understand the roles of NA, sigma and lambda in aerial image formation for low k1 equals CD/((lambda) /NA) applications. Starting with an idealized representation of the condenser and projection optics in a stepper, the definitions of NA and sigma will be rigorously developed. Next the aerial image will be related to source illumination pattern at the objective pupil that includes the effect of diffraction by the reticle. The initial case considered will be for dense lines and spaces. Off Axis Illumination OAI will then be presented to show exactly what it is and how it can result in increased resolution. The cases of semi-isolated lines and spaces are also be addressed. Also included will be a detailed derivation of the diffraction equations for dense lines and spaces not found in text books.

Citation Download Citation

Peter D. Brooker "Roles of NA, sigma, and lambda in low-k1 aerial image formation", Proc. SPIE 4346, Optical Microlithography XIV, (14 September 2001); https://doi.org/10.1117/12.435713

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