Challenges and opportunities for EPL and EUVL masks

Pawitter J. S. Mangat

doi:10.1117/12.425076

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9 April 2001 Challenges and opportunities for EPL and EUVL masks

Pawitter J. S. Mangat

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Proceedings Volume 4349, 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents; (2001) https://doi.org/10.1117/12.425076
Event: 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents, 2000, Munich, Germany

Abstract

As the semiconductor industry is continuing to stay on the path laid by Moore's, law, challenges in the technology development are on the rise. For the transition from optical lithography to next generation lithography for sub 100 nm nodes, masks are considered to be high risk. Mask issues are not only critical to the NGL technologies--such as Extreme Ultra Violet lithography (EUVL). E-beam Projection Lithography (EPL). Ion projection lithography and X-ray lithography--but also to the extension of optical lithography using 193 and 157 nm wavelengths. The paper addresses the details and progress made on fabrication of EPL and EUVL masks in recent years, highlighting the challenges such as manufacturability, defect control, inspection and repair.

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Pawitter J. S. Mangat "Challenges and opportunities for EPL and EUVL masks", Proc. SPIE 4349, 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents, (9 April 2001); https://doi.org/10.1117/12.425076

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