Application of heterodyne interferometry for the full-field surface shape measurement

Romulad Jozwicki; Tomasz S. Tkaczyk

doi:10.1117/12.417825

7 March 2001 Application of heterodyne interferometry for the full-field surface shape measurement

Romulad Jozwicki, Tomasz S. Tkaczyk

Proceedings Volume 4356, 12th Czech-Slovak-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics; (2001) https://doi.org/10.1117/12.417825
Event: 12th Czech-Slovak-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 2000, Velke Losiny, Czech Republic

Abstract

The subject of the paper is the presentation of applications of the full-field heterodyne interferometer. The description of the interferometer used is given. The basic relations for the fast CCD Dalsa camera are cited. The sources of the measurement errors are discussed. The result of testing the frequency difference stability of acousto-optic modulators are described.

Citation Download Citation

Romulad Jozwicki and Tomasz S. Tkaczyk "Application of heterodyne interferometry for the full-field surface shape measurement", Proc. SPIE 4356, 12th Czech-Slovak-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, (7 March 2001); https://doi.org/10.1117/12.417825

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