Determination of scale nonlinearity in a laser interferometer

Ondrej Cip; Frantisek Petru

doi:10.1117/12.417818

7 March 2001 Determination of scale nonlinearity in a laser interferometer

Ondrej Cip, Frantisek Petru

Proceedings Volume 4356, 12th Czech-Slovak-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics; (2001) https://doi.org/10.1117/12.417818
Event: 12th Czech-Slovak-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 2000, Velke Losiny, Czech Republic

Abstract

In this paper, the causes of nonlinearity of a laser interferometer with a single-frequency laser and a detection system with two signals in quadrature are described. Several methods of nonlinearity measurement are presented. Experimentally was tested a method with a linear mechanical shift and a method of linearity measurement using optical resonator. When using linearity compensation by means of a PC program, a deviation from linearity in limits of +/- 0.5 nm for the linear mechanical shift method was achieved. The preliminary results recorded during the linearity measurement with the optical resonator are below the limit of +/- 1.0 nm.

Citation Download Citation

Ondrej Cip and Frantisek Petru "Determination of scale nonlinearity in a laser interferometer", Proc. SPIE 4356, 12th Czech-Slovak-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, (7 March 2001); https://doi.org/10.1117/12.417818

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