Two-axis micropositioning system with piezoelectric actuators and digital control

Bretislav Mikel; Ondrej Cip; Zdenek Harna

doi:10.1117/12.417849

7 March 2001 Two-axis micropositioning system with piezoelectric actuators and digital control

Bretislav Mikel, Ondrej Cip, Zdenek Harna

Proceedings Volume 4356, 12th Czech-Slovak-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics; (2001) https://doi.org/10.1117/12.417849
Event: 12th Czech-Slovak-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 2000, Velke Losiny, Czech Republic

Abstract

The scanning table, which is controlled by a PZT control system that has been constructed, is presented. It is used for a fine manipulation of a probe in measurement of the profile of the laser beam focused by high NA lens e.g.. The whole system has been calibrated by a two-axis laser interferometer. Where the PZT control system and the interferometer were connected to the CAN network and the actual X-Y position was saved to the PC synchronously with the CAN network time stamps generated by the PZT control system. Precision about 300nm at the positioning system was reached.

Citation Download Citation

Bretislav Mikel, Ondrej Cip, and Zdenek Harna "Two-axis micropositioning system with piezoelectric actuators and digital control", Proc. SPIE 4356, 12th Czech-Slovak-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, (7 March 2001); https://doi.org/10.1117/12.417849

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