Characterization of inductance probe for gauge block measurement by Fizeau interferometer

Kuo-Ming Chang; Gwo-Sheng Peng

doi:10.1117/12.445641

22 October 2001 Characterization of inductance probe for gauge block measurement by Fizeau interferometer

Kuo-Ming Chang, Gwo-Sheng Peng

Proceedings Volume 4401, Recent Developments in Traceable Dimensional Measurements; (2001) https://doi.org/10.1117/12.445641
Event: Lasers in Metrology and Art Conservation, 2001, Munich, Germany

Abstract

Inductance probes are widely used in gauge block comparators. They have to be calibrated by interferometer to fulfill the traceability. To avoid the nonlinearity of interferometer within one interference fringe, a combination of digital and analog servo driving device with integer number of fringe orders of Fizeau interferometer is used to provide the movement for probe calibration. The standard deviation of positioning repeatability of the driving device is about 1 nm. Calibration is performed with double probe arrangement to simulate the actual condition of probes used in gauge block comparators. Typical sensitivity of probes is about 0.3412 V/micrometers with standard deviation of 0.087 percent while nonlinearity is about 9 nm over measuring range of +/- 10 micrometers . A 0.33 percent difference of sensitivity is observed if single probe is arranged in the calibration.

Citation Download Citation

Kuo-Ming Chang and Gwo-Sheng Peng "Characterization of inductance probe for gauge block measurement by Fizeau interferometer", Proc. SPIE 4401, Recent Developments in Traceable Dimensional Measurements, (22 October 2001); https://doi.org/10.1117/12.445641

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