Japanese ultimate flatness interferometer (FUJI) and its preliminary experiment

Toshiyuki Takatsuji; Nobuaki Ueki; Kenichi Hibino; Sonko Osawa; Tomizo Kurosawa

doi:10.1117/12.445643

22 October 2001 Japanese ultimate flatness interferometer (FUJI) and its preliminary experiment

Toshiyuki Takatsuji, Nobuaki Ueki, Kenichi Hibino, Sonko Osawa, Tomizo Kurosawa

Proceedings Volume 4401, Recent Developments in Traceable Dimensional Measurements; (2001) https://doi.org/10.1117/12.445643
Event: Lasers in Metrology and Art Conservation, 2001, Munich, Germany

Abstract

Japanese Ultimate Flatness Interferometer (FUJI) is a Fizeau type flatness interferometer that is capable of measuring flatness over 310 mm diameter. The concept and technologies applied to FUJI are explained. To demonstrate the performance of FUJI, an international comparison was held with Australia, and the difference of two independent measurements were smaller than four nanometers.

Citation Download Citation

Toshiyuki Takatsuji, Nobuaki Ueki, Kenichi Hibino, Sonko Osawa, and Tomizo Kurosawa "Japanese ultimate flatness interferometer (FUJI) and its preliminary experiment", Proc. SPIE 4401, Recent Developments in Traceable Dimensional Measurements, (22 October 2001); https://doi.org/10.1117/12.445643

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