Fabrication of fluidic manifold systems using single-exposure grayscale masks

Christopher J. Hayden; Julian P.H. Burt

doi:10.1117/12.425210

26 April 2001 Fabrication of fluidic manifold systems using single-exposure grayscale masks

Christopher J. Hayden, Julian P.H. Burt

Proceedings Volume 4404, Lithography for Semiconductor Manufacturing II; (2001) https://doi.org/10.1117/12.425210
Event: Microelectronic and MEMS Technologies, 2001, Edinburgh, United Kingdom

Abstract

Lab-on-a-chip devices are currently being developed at the University of Wales, Bangor. These devices can be used to manipulate and characterize bio-particles suspended in a fluid medium . For precise operation, accurate fluidic transport within these devices is required, for example at channel junctions where flow rates or mixing must be controlled. We present a technique for the production of varying cross-section channels and fluidic manifolds by photolithographic exposure of greyscale masks. This technique is ideally suited to the rapid prototyping and production of lab-on-a-chip devices, since a single exposure system is both faster and simpler than other methods currently available.

Citation Download Citation

Christopher J. Hayden and Julian P.H. Burt "Fabrication of fluidic manifold systems using single-exposure grayscale masks", Proc. SPIE 4404, Lithography for Semiconductor Manufacturing II, (26 April 2001); https://doi.org/10.1117/12.425210

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