MEMS hybridization: bridging the free-space gap

Paul Blair; Duncan McMillan; Jean Podlecki; Mark L. Begbie; Kevin Yallup

doi:10.1117/12.425302

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30 April 2001 MEMS hybridization: bridging the free-space gap

Paul Blair, Duncan McMillan, Jean Podlecki, Mark L. Begbie, Kevin Yallup

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Proceedings Volume 4407, MEMS Design, Fabrication, Characterization, and Packaging; (2001) https://doi.org/10.1117/12.425302
Event: Microelectronic and MEMS Technologies, 2001, Edinburgh, United Kingdom

Abstract

The increasing demand for bandwidth is driving the development of new paradigms within the fibre optic telecomms industry and leading to the generation of a new range of optical components. One route being taken is the hybridization of discrete components into a single package to realize high functionality subsystems. The combination of MEMS with light guide technology is one hybridization pathway that is showing considerable potential. In the drive for novel functionality it is paramount that the performance parameters are not compromised, nor should the hybridization of discrete components lead to increased manufacturing and packaging complexity and reliability issues. A theoretical and experimental study of integration schemes has shown that it is possible to integrate MEMS components with light guide technologies using just simple air gaps while preserving key performance parameters.

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Paul Blair, Duncan McMillan, Jean Podlecki, Mark L. Begbie, and Kevin Yallup "MEMS hybridization: bridging the free-space gap", Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); https://doi.org/10.1117/12.425302

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