MEMS technologies for rf communications

Qun Wu; B. K. Kim

doi:10.1117/12.425311

30 April 2001 MEMS technologies for rf communications

Qun Wu, B. K. Kim

Proceedings Volume 4407, MEMS Design, Fabrication, Characterization, and Packaging; (2001) https://doi.org/10.1117/12.425311
Event: Microelectronic and MEMS Technologies, 2001, Edinburgh, United Kingdom

Abstract

Microelectromechanical system (MEMS) represents an exciting new technology derived from the same fabricating processes used to make integrated circuits. The trends of growing importance of the wireless communications market is toward the system with minimal size, cost and power consumption. For the purpose of MEMS R&D used for wireless communications, a history and present situation of MEMS device development are reviewed in this paper, and an overview of MEMS research topics on RF communication applications and the state of the art technologies are also presented here.

Citation Download Citation

Qun Wu and B. K. Kim "MEMS technologies for rf communications", Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); https://doi.org/10.1117/12.425311

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