Model library and tool support for MEMS simulation

Peter Schwarz; Peter Schneider

doi:10.1117/12.425295

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30 April 2001 Model library and tool support for MEMS simulation

Peter Schwarz, Peter Schneider

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Proceedings Volume 4407, MEMS Design, Fabrication, Characterization, and Packaging; (2001) https://doi.org/10.1117/12.425295
Event: Microelectronic and MEMS Technologies, 2001, Edinburgh, United Kingdom

Abstract

FEM simulation is often a very time-consuming process in the design optimization of complex MEMS. System-level models with reduced order and accuracy have to be generated as a basis of a multi-domain system simulation. A powerful modelling methodology is needed to develop a library of MEMS models for different physical domains (mechanical, magnetic, fluidic, ...). The components are modelled as multi-terminal elements (multipoles) in generalized KIRCHHOFFian networks and are described with VHDL-AMS or other model description languages. Numerical model generation and parameterization is supported by a tool suite. Simulator coupling offers an additional possibility for analyzing heterogeneous MEMS.

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Peter Schwarz and Peter Schneider "Model library and tool support for MEMS simulation", Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); https://doi.org/10.1117/12.425295

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