Translator Disclaimer
30 April 2001 Wafer scale packaging for a MEMS video scanner
Author Affiliations +
Proceedings Volume 4407, MEMS Design, Fabrication, Characterization, and Packaging; (2001)
Event: Microelectronic and MEMS Technologies, 2001, Edinburgh, United Kingdom
Miniaturized scanners have proven their usefulness in a host of applications including video display, bar code reading, image capture, laser printing and optical switching. In order for these applications to reach fruition, however, the MEMS scanner component must be packaged in a manner that is compatible with the volume manufacturing capabilities of the technology. This paper describes a process that was developed to package an SVGA resolution (800 X 600) biaxial video scanner. The scanner is designed for a head mounted display product, targeted to the medical and industrial markets. The scanner is driven magnetically on one axis and capacitively on the other axis. The first level wafer scale package described here incorporates the capacitive drive electrodes into the mounting substrate. The substrate wafer and the device wafer are then bonded using a glass frit sealing technique. Finally, the scanner and substrate are hermetically sealed into a metal can at reduced pressure.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mark P. Helsel, Jon Barger, David W. Wine, and Thor D. Osborn "Wafer scale packaging for a MEMS video scanner", Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001);


Reliability enhancement of Ohmic RF MEMS switches
Proceedings of SPIE (February 18 2011)
Silicon-glass anodic bonding at low temperature
Proceedings of SPIE (January 22 2005)
Vacuum wafer-level packaging for MEMS applications
Proceedings of SPIE (January 15 2003)
Characterization of glass on electronics in MEMS
Proceedings of SPIE (September 03 1999)
Wafer capping of MEMS with fab-friendly metals
Proceedings of SPIE (January 19 2007)

Back to Top