Dynamic simulation of optical MEM switches

Timothy P. Kurzweg; Jose A. Martinez; Steven Peter Levitan; Philippe J. Marchand; Donald M. Chiarulli

doi:10.1117/12.425349

5 April 2001 Dynamic simulation of optical MEM switches

Timothy P. Kurzweg, Jose A. Martinez, Steven Peter Levitan, Philippe J. Marchand, Donald M. Chiarulli

Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425349
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France

Abstract

Micro-optical-electrical-mechanical systems (MOEMS) present a new set of challenges for systems on a chip (SoC) and mixed- technology designers including the need for mixed-signal multi-domain simulation. We present new modeling techniques for optical and mechanical MEM components and apply these models to the simulations of a MOEMS switch for optical fiber telecommunications applications.

Citation Download Citation

Timothy P. Kurzweg, Jose A. Martinez, Steven Peter Levitan, Philippe J. Marchand, and Donald M. Chiarulli "Dynamic simulation of optical MEM switches", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); https://doi.org/10.1117/12.425349

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