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5 April 2001 Integrating optical wave simulation into microsystems CAD tools
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Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425350
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France
Abstract
A method for integrating optical wave propagation into electrical simulators is presented. For this purpose the Beam Propagation Method has been implemented using the HDL-ATM language. This enables the simulation of optical wave propagation on the system level, using current Microsystems CAD tools. Some typical optical components have been simulated using this technique and satisfactory results were obtained. This enables the analysis of MOEMS components into standard Microsystems CAD tools using electrical simulators.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bassam Saadany and Diaa Abdel-Maguid M. Khalil "Integrating optical wave simulation into microsystems CAD tools", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); https://doi.org/10.1117/12.425350
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