Meshing approach in nonlinear FEM analysis of microstructures under electrostatic loads

Aurelio Soma; Francesco De Bona; A. Gugliotta; E. Mola

doi:10.1117/12.425377

5 April 2001 Meshing approach in nonlinear FEM analysis of microstructures under electrostatic loads

Aurelio Soma, Francesco De Bona, A. Gugliotta, E. Mola

Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425377
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France

Abstract

The aim of this work is that of analyzing how the discretization of a coupled electro-mechanical system has to be approached to have accurate results from a Finite Element Method (FEM) simulation. Main aspect concerns the definition of the finite element mesh at the interface between the two domains. From this point of view a hybrid approach is proposed, where a fixed mesh is used for the mechanical structure and for the electrostatic area, whereas a morphing approach is followed for the volume that surrounds the most deformable part of the structure. Other aspects related to the electrical domain discretization, as open boundary modelling, pole positioning of infinite mapped element dimension of the electrostatic area were also considered. Numerical tests were carried out in the simple case of a cantilever, following an explicit coupled solution based on an iterative scheme elaborated in ANSYS^TM parametric design language (APDL).

Citation Download Citation

Aurelio Soma, Francesco De Bona, A. Gugliotta, and E. Mola "Meshing approach in nonlinear FEM analysis of microstructures under electrostatic loads", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); https://doi.org/10.1117/12.425377

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