Micromechanical dc-dc converter

Mikko Mottonen; Aarne S. Oja

doi:10.1117/12.425376

5 April 2001 Micromechanical dc-dc converter

Mikko Mottonen, Aarne S. Oja

Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425376
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France

Abstract

A micromechanical silicon device suitable for DC-DC voltage up-conversion is investigated theoretically. The behavior of the converter is simulated in the time domain using a circuit simulator. In simulations ignoring parasitic capacitances, DC voltage of level of 16 V is increased to 32 V using a micromechanical converter. The output power is 2 mW for a device with 1 mm² surface area.

Citation Download Citation

Mikko Mottonen and Aarne S. Oja "Micromechanical dc-dc converter", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); https://doi.org/10.1117/12.425376

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