Tunable rf MEMS resonators and filters

E. Larique; Pierre Blondy; M. Chatras; D. Mercier; D. Cros; L. Basteres; B. Guillon

doi:10.1117/12.425386

5 April 2001 Tunable rf MEMS resonators and filters

E. Larique, Pierre Blondy, M. Chatras, D. Mercier, D. Cros, L. Basteres, B. Guillon

Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425386
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France

Abstract

MicroElectroMechanical (MEMs) components and their applications to different RF and millimeter wave tunable filters are presented in this paper. Original topologies, design flows and RF performances of elementary building components like inductors and tunable capacitors are first detailed. Quartz or silicon-based inductors with quality factor Q in the order of 55 2 GHz and broad range MEMs varactors with continuous tuning values have been developed. Then, those elements are used to obtain several RF lumped element filters, one tunable discretely between 2.5 GHz and 3.5 GHz and another one tunable continuously between 1.8 GHz and 1.9 GHz. Finally, a distributed millimeter wave filter is proposed, with tunable center frequency and tunable bandwidth.

Citation Download Citation

E. Larique, Pierre Blondy, M. Chatras, D. Mercier, D. Cros, L. Basteres, and B. Guillon "Tunable rf MEMS resonators and filters", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); https://doi.org/10.1117/12.425386

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