CD measurement for next-generation mask

Takeshi Yamane; Takashi Hirano

doi:10.1117/12.438378

5 September 2001 CD measurement for next-generation mask

Takeshi Yamane, Takashi Hirano

Author Affiliations +

Proceedings Volume 4409, Photomask and Next-Generation Lithography Mask Technology VIII; (2001) https://doi.org/10.1117/12.438378
Event: Photomask and Next Generation Lithography Mask Technology VIII, 2001, Kanagawa, Japan

Abstract

Since higher Critical Dimension (CD) accuracy on mask is required, there is a need to optimize CD definition for lithography. The conventional CD definition is based on the cross-sectional profile of mask pattern, but the cross-sectional profile does not reflect aerial image on wafer. Therefore, CD definition based on aerial image on wafer is preferable to the cross-sectional profile. We formulated a CD definition that reflects aerial image on wafer. In our definition, CD is called CDad. There are two types of CD measurement equipment: top view type such as CD-SEM, and transmitted light type such as deep-UV microscope. By simulation and experiment, we evaluated CD of top view and CD of deep-UV microscope to obtain CDad. The results show that CDad can be obtained with deep-UV microscope, but not to top view. Deep-UV microscope is available for CD measurement of 0.11 and 0.13 um generation masks.

Citation Download Citation

Takeshi Yamane and Takashi Hirano "CD measurement for next-generation mask", Proc. SPIE 4409, Photomask and Next-Generation Lithography Mask Technology VIII, (5 September 2001); https://doi.org/10.1117/12.438378

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE