Paper
17 April 2001 Photoluminescence Fourier-IR-transmission deep-level transient spectroscopy studies of diamond layers grown by hot-filament CVD
Kazimierz Fabisiak, Agnieszka Banaszak, Zbigniew Lukasiak, Waclaw Bala, Marceli Kaczmarski
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Abstract
The polycrystalline thin diamond films grown by HF CVD technique have been studied by FTIR, ESR, X-ray, Raman and photoluminescence spectroscopy. Pl spectra were recorded in temperatures range of 10-300K. The thermal behavior of the broad band luminescence indicates a D-A pair recombination process. The defects taking part in luminescence can be associated with hydrogen related centers. The presence of hydrogen in the diamond layers has been confirmed by FTIR and ESR measurements.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kazimierz Fabisiak, Agnieszka Banaszak, Zbigniew Lukasiak, Waclaw Bala, and Marceli Kaczmarski "Photoluminescence Fourier-IR-transmission deep-level transient spectroscopy studies of diamond layers grown by hot-filament CVD", Proc. SPIE 4413, International Conference on Solid State Crystals 2000: Epilayers and Heterostructures in Optoelectronics and Semiconductor Technology, (17 April 2001); https://doi.org/10.1117/12.425428
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KEYWORDS
Diamond

Chemical vapor deposition

Luminescence

Raman spectroscopy

Hydrogen

Spectroscopy

FT-IR spectroscopy

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