Machine for electrochemical etch stop

Kun Zhou; Mujie Lan; Weiping Chen; Donghong Wang

doi:10.1117/12.440238

14 September 2001 Machine for electrochemical etch stop

Kun Zhou, Mujie Lan, Weiping Chen, Donghong Wang

Proceedings Volume 4414, International Conference on Sensor Technology (ISTC 2001); (2001) https://doi.org/10.1117/12.440238
Event: International Conference on Sensing units and Sensor Technology, 2001, Wuhan, China

Abstract

The configurations of electrochemical silicon etch-stop are discussed in this paper. An electrochemical etching machine with software and hardware, which can control the etching process of silicon very well, is designed and fabricated bas don the theory of electrochemical etching. Accurate etching temperature is obtained by modified integral algorithm of PID presented in temperature control in software. With an algorithm presented in control of etch-stop, the tech-stop point can be detected according to the characteristics of p- n junction current-time in electrochemical etching. The machine with hardware including S/H, controller and actuator can adapt to all wet etching configurations such as poly- electrode electrochemical etch-stop.

Citation Download Citation

Kun Zhou, Mujie Lan, Weiping Chen, and Donghong Wang "Machine for electrochemical etch stop", Proc. SPIE 4414, International Conference on Sensor Technology (ISTC 2001), (14 September 2001); https://doi.org/10.1117/12.440238

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available