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8 May 2001 High-sensitivity fiber optic Fabry-Perot pressure sensors for medical applications
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Proceedings Volume 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001); (2001) https://doi.org/10.1117/12.426996
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '01), 2001, Yokohama, Japan
Abstract
The miniature fiber optic Fabry-Perot pressure sensor with a silicon diaphragm was developed for medical applications. The configuration of this sensor was a 1-mm long fiber optic Fabry-Perot interferometer bonded to an 80 micrometers -thick diaphragm. The length of the sensor was about 1.5 mm and the area of the diaphragm was 1 mm x 1 mm. The phase shift of the interferometric sensor was proportional to the applied pressure. The relationship between the applied pressure and the phase change was nonlinear.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ju Young Joung, Kyung Chan Kim, Insoo S. Kim, and Jaehee Park "High-sensitivity fiber optic Fabry-Perot pressure sensors for medical applications", Proc. SPIE 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001), (8 May 2001); https://doi.org/10.1117/12.426996
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